Using microtechnology to get to nanotechnology

2020-02-14 22:51:20

force mechanical dimensions nanotechnology microscopy

责任者: Gautsch, S.;de Rooij, N.;Staufer, U.;Akiyama, T.;Aeschiman, L. 单位: Inst. de Microtechnol., Neuchatel Univ., Switzerland 来源出处: Machine Design International(Mach. Des. Int. (USA)),2 Sept. 2004,76(17):65-8 摘要: Engineers have been building mechanical elements and devices with dimensions in the hundreds of micrometers or MEMS (microelectromechanical systems). They wanted to exploit certain properties inherent in small parts. Hence, microtechnology is building the tools researchers need to turn nanoscience into nanotechnology. Nanotools need not have nanometer-scale dimensions, but they do require micro to millimeter size components to act as alligator clips or interfaces between the nano and macro worlds. In this paper, some of the newer nanotools such as dynamic-force sensor, cantilever SNOM-probe and micropipette tips are discussed 关键词: atomic force microscopy;force sensors;micromechanical devices;nanotechnology;near-field scanning optical microscopy;microtechnology;nanotechnology;mechanical elements;mechanical devices;MEMS;microelectromechanical systems;nanoscience;nanotools;nanometer scale dimensions;alligator clips;dynamic force sensor;cantilever SNOM probe;micropipette tips;scanning near field optical microscopy;AFM;atomic force microscopy