Perspectives of laser processing and chemistry

2019-12-31 11:03:57

processing surface laser cleaning chemistry

责任者: Bauerle, D.;Denk, R.;Pedarnig, J.D.;Piglmayer, K.;Heitz, J.;Schrems, G. 单位: Angewandte Phys., Johannes Kepler Univ., Linz, Austria 来源出处: Applied Physics A (Materials Science Processing)(Appl. Phys. A, Mater. Sci. Process. (Germany)),2003/07/,A77(2):203-7 摘要: Laser-induced material processing is reviewed with special emphasis on recent achievements mainly obtained by the Linz group. Among those are investigations using optical fiber tips for nanoscale photophysical etching, laser-induced surface patterning using self-assembled microspheres, the pulsed-laser deposition of thin films of high-temperature superconductors and the modification and cleaning of surfaces 关键词: barium compounds;high-temperature superconductors;laser beam etching;laser materials processing;pulsed laser deposition;superconducting thin films;surface chemistry;surface cleaning;yttrium compounds;laser induced material processing;chemistry;Linz group;optical fiber tips;nanoscale photophysical etching;self assembled microspheres;pulsed laser deposition;PLD;thin films;high temperature superconductors;surface cleaning;YBa2Cu3O7-δ