Silicon-on-insulator based nanoresonators for mechanical mixing at radio frequen

2019-12-08 07:10:22

frequency processing devices mixing mechanical

责任者: Erbe, A.;Blick, R.H. 单位: Center for NanoScience & Sekt. Phys., Ludwig-Maximilians-Univ., Munchen, Germany 来源出处: IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control(IEEE Trans. Ultrason. Ferroelectr. Freq. Control (USA)),2002/08/,49(8):1114-17 摘要: Nanomechanical resonators now allow operating frequencies approaching the range of several 100 MHz. Thus, nanomechanical devices become interesting for applications in signal processing. The main advantage of these devices is their high robustness against thermal and electrical shocks. Therefore, they can be used as very sensitive detectors or frequency selective components in communication electronics. Driving the resonators into nonlinear response increases the sensitivities further. Most importantly, such resonators can be used for a novel kind of mechanical mixing. Here, the mechanical oscillations of tiny bridges and oscillators can be used to realize such novel devices for high-frequency signal processing. We present measurements on mechanical mixing in a nanomechanical resonator operated at 100 MHz 关键词: micromechanical resonators;mixers (circuits);nanotechnology;silicon-on-insulator;VHF devices;SOI based nanoresonators;NEMS;mechanical mixing;radio frequencies;nanomechanical devices;sensitive detectors;frequency selective components;communication electronics;nonlinear response;nanomachined mechanical mixers;mechanical oscillations;bridges;oscillators;high-frequency signal processing;HF signal processing;100 MHz;Si