Fine particles synthesis in excimer laser assisted decomposition of tetraethylor

2019-10-10 11:37:31

particles decomposition laser excimer assisted

责任者: Smolik, J.;Moravec, P.;Kubat, P. 单位: Inst. of Chem. Process Fundamentals, Acad. of Sci., Prague, Czechoslovakia 来源出处: Journal of Materials Science Letters(J. Mater. Sci. Lett. (UK)),1996/06/01,15(11):984-6 摘要: We investigate various chemical approaches to gas phase synthesis of ultrafine Si-C-O particles using tetraethylorthosilicate (TEOS) as a precursor. Preparation of fine particles by excimer laser assisted TEOS vapour decomposition was studied 关键词: carbon compounds;laser beam applications;materials preparation;nanostructured materials;pyrolysis;silicon compounds;excimer laser assisted decomposition;tetraethylorthosilicate vapour;ultrafine particles;gas phase synthesis;TEOS;Si-C-O