Focused-ion-beam nanofabrication of near-infrared magnetic metamaterials

2019-09-11 20:46:00

The infrared ion nanofabrication metamaterials

责任者: Enkrich, Christian;Perez-Willard, Fabian;Gerthsen, Dagmar;Zhou, Jiangfeng;Koschny, Thomas;Soukoulis, Costas M.;Wegener, Martin;Linden, Stefan 单位: Institut fur Angewandte Physik, Universitat Karlsruhe (TH), D-76131 Karlsruhe, Germany 来源出处: Advanced Materials,2005,17(21):2547-2549 摘要: The process of nanofabrication of near-infrared magnetic metamaterials via focused-ion-beam writing was analyzed. The starting point of the nanofabrication was a glass substrate, coated with a 5 nm thin film of indium tin oxide (ITO) and a 20 nm film of gold. The FIB writing corresponded to an inverse process in the sense that the FIB removes material. Transmission spectra were measured with a Fourier-transform infrared spectrometer combined with an infrared microscope. The Drude model was used to describe the metal, such as the effective permittivity of metals in the infrared spectral region. 关键词: Magnetic materials;Nanotechnology;Ion beams;Indium compounds;Tin compounds;Gold;Permittivity;Glass;Infrared spectrometers;Infrared spectroscopy;Focused-ion-beam nanofabrication;Glass substrates;Magnetic metamaterials