Characterization of TiN thin films subjected to nanoindentation using focused io

2019-08-14 08:48:51

steel using coating observed nanoindentation

责任者: Ma, L.W.;Cairney, J.M.;Huffman, M.J.;Munroe, P.R. 单位: Materials Science and Engineering, University of New South Wales, Sydney, NSW 2052, Australia 来源出处: Applied Surface Science,2004,237(1-4):631-635 摘要: The microstructure and surface morphology of a TiN hard, wear resistant coating on a V820 nitridable alloy ductile steel substrate following nanoindentation have been characterized using focused ion beam (FIB) milling. ATiN coating, [similar to] 0.6 (xm in thickness, was deposited on a ductile steel substrate using a cathodic arc evaporation (CAE) technique. Pop-in events were observed in the load-displacement curves and correlated to the observed microstructural features. Following nanoindentation with a 1 μm radius spherical indenter at loads of 100 mN and 500 mN, circumferential cracks were observed inside the indentation. Observations of nanoindented cross-sections prepared using FIB revealed both columnar cracks in the coating and shear steps at the coating-substrate interface. These structural features were observed at higher resolution using a transmission electron microscope (TEM). © 2004 Elsevier B.V. All rights reserved. 关键词: Titanium nitride;Thin films;Indentation;Ion beams;Coatings;Microstructure;Cracks;Surfaces;Transmission electron microscopy;Steel;Substrates;Deformation;Grain boundaries;Nanoindentation;FIB;Cathodic arc evaporation (CAE);Ductile steel substrates