Structural analysis of anatase polycrystalline films using time-dependent deform

2019-07-28 23:09:21

deformation behavior films dependent polycrystalline

责任者: Sugata, Hironori;Ohshio, Shigeo;Saitoh, Hidetoshi 单位: Department of Chemistry, Nagaoka University of Technology, Nagaoka, Niigata 940-2188, Japan 来源出处: Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers,2003,42(4 A):1738-1743 摘要: We introduce an analytical technique for time-dependent deformation behavior of polycrystalline films using a nanoindenter. This technique permits evaluation of structural deformation of thin films in the nanometer scale. The void structure of polycrystalline films of anatase was evaluated using time-dependent deformation behavior. The void structure was examined using a power-law model in which a strain rate sensitivity exponent m of the sample was determined. The m value enabled us to detect the existence of the void structure. In this study, appropriate conditions were determined to measure deformation behavior of polycrystalline films. The analysis of time-dependent deformation behavior is useful for investigating the void structure of polycrystalline films. 关键词: Polycrystalline materials;Thin films;Deformation;Surface structure;Morphology;Strain rate;Creep;Grain boundaries;Chemical vapor deposition;Atmospheric pressure;Substrates;Thermocouples;Microstructure;Polycrystalline film;Time-dependent deformation;Nanoindenter;Nanoindentation technique;Power-law model