A new approach for the direct synthesis of nanocomposite thin films by ion-beam

2019-07-05 16:20:14

processing films electron ion microscopy

责任者: Enrique, R.;Wu, F.;Bellon, P. 单位: Department of Mat. Sci./Eng., Frederick Seitz Mat. Res. Lab., Urbana, IL 61801, United States 来源出处: Surface and Coatings Technology,2002,150(1):1-7 摘要: While energetic ion beams have been widely used to change the near-surface composition of thin films, the common practice is to rely on thermal annealing to control the distribution of chemical species in the processed layer. Our recent modeling and experimental work, however, establishes that ion-beam processing at a controlled temperature can also be used to tailor new microstructures with tunable length scales. In the case of a thin film made of immiscible elements, e.g. Cu and Ag, we show that ion-beam processing at intermediate temperatures (100-150°C) stabilizes nanocomposite structures. The relationship between processing conditions and microstructures is studied by X-ray diffraction (XRD), transmission electron microscopy (TEM) and scanning TEM, while the impact on hardness is followed by nanoindentation. © 2002 Elsevier Science B.V. All rights reserved. 关键词: Thin films;Nanostructured materials;Synthesis (chemical);Ion beams;Annealing;Hardness;Indentation;Thermal effects;X ray diffraction analysis;Transmission electron microscopy;Scanning electron microscopy;Computer simulation;Nanocomposite thin films