| Visible luminescence from nanocrystalline silicon films produced by plasma enhan |
| Microstructure of silicon nitride thin film |
| a-Si(Er):H films prepared by metalorganic assisted PECVD with strongly hydrogen- |
| Characteristics of multiwalled carbon nanotube nanobridges fabricated by poly(me |
| Corrosion protection and mechanical performance of SiO2 films deposited via PECV |
| Characterization of PECVD boron carbonitride layers |
| Single chamber PVD/PECVD process for in situ control of the catalyst activity on |
| Temperature dependence of mechanical properties of DLC/Si protective coatings pr |
| Thin film silicon materials and solar cells grown by pulsed PECVD technique |
| Carbon nanotube growth by PECVD: a review |
| Synthesis of carbon nanotubes on metallic substrates by a sequential combination |
| Stacked gate insulator of photooxide and PECVD film from SiH4 and N2O for low-te |
| Experimental study of breakdown characteristic of thin dielectric film in nanome |
| Freestanding individual single-walled carbon nanotube synthesis based on plasma |
| Dielectric property-microstructure relationship for nanoporous silica based thin |
| Nanocomposites of amorphous hydrogenated carbon and siloxane networks produced b |
| Experimental study on wet thermal and PECVD oxides for GOI fabrication |