| Downscaling ULSIs by using nanoscale engineering |
| Nano-MOSFETs for future ULSI applications |
| ULSI interconnect formation using dispersed nanoparticles |
| Chemical analysis of Hf-silicide clusters studied by photoemission spectroscopy |
| Issues and perspectives for giga to tera scale integration |
| Ultrathin silicon oxynitride films for giga-bit ULSI |
| Introduction in space technologies, processing and applications of ULSI/WSI/3D-W |
| High-quality SOI wafer technology for the 0.1-μm era |
| Progress in research on low dielectric constant-nanoporous silica films |
| Extremely ultraviolet lithography fabrication technology for nanometer ULSI devi |
| Extreme ultraviolet nanolithography for ULSI: a review |
| Structural and compositional evolutions of low-k films for advanced ULSI interco |